MEMS and MOEMS: technologies, products, applications and markets
■ The first micro-systems that aimed to associate micro-electronic circuits with different non-electronic functions, such as environment perception, data processing, decision-making, data transmission and action triggering, started to appear in the United States in the 1990s. Today, a MEMS is a system whose volume is less than a few mm3, which has at least one of the two following electrical, mechanical, biological or magnetic functions: sensor and/or signal processing and/or actuator and/or power supply and/or transmission. More and more industrial sectors are seeking global, perfectly integrated systems that include sensors, actuators, intelligence and fluid systems. Thus MEMS are used or will be used in a large number of applications for the automobile, biomedical, space, defence, aeronautics, power, environment, IT, telecommunications, electro-technical, intelligent housing and the household electrical appliance sectors. This market should represent close to 30 billion euros in 2002. Co-ordinated and written by a European expert in the field, this survey provides the most recent state of the art review on existing MEMS and those being developed in industrial and academic laboratories in Europe, North America and Japan. It includes the latest data published on applications and their corresponding markets.
- Publication: February 2002
- 2-906024-36-8
- Price for single work station: 350 euros, ex. tax
- Price for several work stations: 950 euros, ex. tax
